Semiconductor,
Display Equipment

ICS (Inert gas Circulation System)

ICS-Series (Inert gas Circulation System) are newly, automatically purifying and circulating pure atmosphere with oxygen and moisture levels below 1 ppm through enclosure (volume 2m³ up to 200m³) of glove box in Semiconductor, LCD/OLED, Smart Window industry, and also designed auto-switchover, auto-leak check, auto-purge, auto-regeneration as our highest operational standard. In order to continually remove oxygen and moisture during gas circulation, special blower and two reactor columns are installed. Optionally, solvent removal.
All process basic parameters like moisture, oxygen, pressure are not only monitored by safety sensors but also utilities like working gas, control gas, regeneration gas are controlled during processing.

시스템 특성과 안전성

Sub ppm level impurity removal (O₂：< 1 ppm, H₂O:< 1 ppm:IS010648-2) with catalyst and adsorbent PLC based automatic controller with touch panel display Standard mode operation for energy saved quality control
Single & Multiple reactor columns Optimum performance for attached enclosure volume (2~200m³ models, optional up to 1,000m³) Capacity to remove 20~4,000 liter of O₂ and 1,000~200,000g of H₂O (standard model)
※ specifications are subject to change without notice




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