HVPE (Hydride Vapor Phase Epitaxy)
HVPE(Hydride Vapor Phase Epitaxy): Metal(aluminum, Al) or semiconductor(Gallium, Ga, Indium, In) reacts with hydrochloric acid gas(HCl) and produces gas-stated gallium chloride(GaCl).
It is sent to a reaction chamber and then reacts with ammonia gas(NH3) at above1000℃. After that, on the surface of sapphire wafer is grown nitride compound(AlN, GaN)