Semiconductor,
Display Parts

GL IGS-Series (IGS Pressure Transducer)

The GL IGS-series is extremely low internal volume and excellent long-term stability as utilizing sensor available for UHP pressure transducers, sputtered Metal Thin Film Technology, It is technologicaly advanced products for gas supply system, gas distribution system, process tools.
LEADERS & GLOBAL only specializes in the manufacture of UHP Products for Semiconductor, Display, Solar Cell industry. We promise you to do our best for the best quality, service and continuously endeavor to make you deep impression.

특징 / 주요 사양

CE Certified/RoHS compliant



Superior Long Term Stability (instability and output errors due to Joule-Thomson effects(cooling effects))



Hastelloy for corrosive gases, Stainless Steel 316L (Double-Melt available)



The circuits are isolated from external interferences with EMI/EMC filters



Electro-polished Stainless Steel 316L gas-wetted materials and Cleaning and Package in classroom zone ±0.5% Repeatability, ±0.25% Accuracy



Products are designed with specific functional industry standards(ISA, SEMI, SEMASPEC, ASTM, ASME, FM Approval)



-Compactness



- Reliability



- Easy installation and maintenance



- Standardization



- High performance of key technology





적용분야

IGS(Integrated Gas delivery System) block module for Process Tools in Semiconductor or Display Industry


GL IGS - 부품.pdf첨부파일