Adsorption,
Catalyst and Getter Purification Technology

Point-of-use(POU) and In-line gases purifiers not only ensure safely consistent and repeatable process performance, but also were designed to isolate crucial process zones from in-house gases distribution systems, and protect against gases purity upsets and cross contamination, finally to improve lifetime and much better outlet purity to ppt levels.Additionally, they have wide range of gases compatibility, low pressure drop, and even are regenerable so that may eliminate disposal issues and costs, and improved cost of ownership(COO). Also, they are designed to use at room temperature purification except the getter based purifiers because of irreversible chemical bonds with impurities. But the getter based purifiers provide the most complete removal of impurities for hydrogen(H₂), nitrogen(N₂), rare gases and utilizes the only purification technology capable of removing all hydrocarbons and nitrogen from process gases. The optimized design provides sub-ppb performance than gases from cylinder or liquid sources, in small footprints with flow rates up to 150 slpm for POU purifier and up to 1,000slpm for In-line purifier.

Gas Purified: Nitrogen(N₂), Hydrogen(H₂), Oxygen(O₂), Argon(Ar), Rare Gases for (He, Ne, Xe, Kr) and Special gases for(NH₃, HCl, Cl₂, CF₄, C₂F₆, SF₆)