Semiconductor,
Display Equipment

Getter

The Getter Purifiers designed to provide sub-ppb levels impurity gases for Semiconductor, LCD/OLED, Solar Cell and LED applications are heated getter-based purification. The Getter materials(Zirconium and its alloys) remove impurities by combining irreversible chemical bonds and operate at elevated temperatures to purify them. Once the vessel is consumed it can be replaced with a new vessel, for a new lifetime. Outlet impurity levels for O₂, CO, CO₂, H₂O, H₂, CH₄(THC, NMHC) and N₂ are reduced to sub-ppb concentration. Hydrogen removal unit, a ambient operated getter cartridge can eliminate hydrogen impurity. It can be manufactured from high flow rates of 10 to 200 Nm3/h.

특징

  • Small footprint with compact design,
  • Safety Alarms and Interlock for High Temperature, Leakage, Over Pressurization
  • Safety Relief Kit and Leak Detection
  • Enhanced PLC Controller and electronics box designed for simple operation and reliability
  • All Metal Enclosure, 316L stainless steel electropolished wetted surface finish
  • Splendid Pre-heaters and Air Cooled Heat Exchanger
  • Fully automatic Bypass



선택 사양


  • Moisture Analyzer

  • Auto or Manual Bypass manifold kit

  • MFM(Mass Flow Meter)

  • UPS(Uninterrupted Power Supply) or Battery Back-up

  • 0.003㎛ Metal Particle Filter

  • Isolation Valves and Pressure Transducers on downstream and upstream





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