Semiconductor,
Display Equipment

Adsorption & Catalyst & Getter

The Adsorption, Catalyst and Getter Purifiers utilize a combination of getter and adsorption-catalytic processes to provide ultra-high purity gas. Outlet impurity levels are reduced to low parts per billion (ppb) levels. Two adsorption-catalytic beds(columns, vessels) removes O₂, CO, CO₂ and H₂O while the downstream getter vessel, operated at an elevated temperature, eliminates N₂ and CH₄. The two vessels alternate between purify and regeneration mode providing continuous purification. The adsorption-catalytic regeneration is accomplished by back flushing with purified hydrogen at elevated temperatures. The purifiers use multiple columns processes designed to provide ultra-high purified gases for semiconductor, flat panel display, LED and solar cell applications, as well as it can be manufactured from high flow rates of 5 to 600 Nm³/h optionally high pressure up to 200barg(3000psig)
Leaders and Global has many years of experience in manufacturing purifiers to meet the needs of low cost, high performance and reliability.
Gas Purified : Argon(Ar), Helium(He), Hydrogen(H₂), Nitrogen(N₂)

특징

  • Safety Alarms and Interlock for High Temperature, Leakage, Over Pressurization
  • Safety Relief Kit and Leak Detection
  • Enhanced PLC Controller and electronics box designed for simple operation and reliability
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  • All Metal Enclosure, 316L stainless steel electropolished wetted surface finish
  • Splendid Preheaters and Walter Cooled Heat Exchanger
  • Redundant Closed-Loop System for Temperature control



선택 사양


  • Moisture Analyzer

  • Auto or Manual Bypass manifold kit

  • MFM(Mass Flow Meter)

  • UPS(Uninterrupted Power Supply) or Battery Back-up

  • 0.003㎛ Metal Particle Filter

  • Isolation Valves and Pressure Transducers on downstream and upstream





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