ICS (Inert gas Circulation System)
ICS-Series (Inert gas Circulation System) are newly, automatically purifying and circulating pure atmosphere with oxygen and moisture levels below 1 ppm through enclosure (volume 2m³ up to 200m³) of glove box in Semiconductor, LCD/OLED, Smart Window industry, and also designed auto-switchover, auto-leak check, auto-purge, auto-regeneration as our highest operational standard. In order to continually remove oxygen and moisture during gas circulation, special blower and two reactor columns are installed. Optionally, solvent removal.
All process basic parameters like moisture, oxygen, pressure are not only monitored by safety sensors but also utilities like working gas, control gas, regeneration gas are controlled during processing.