CE Certified/RoHS compliant
Superior Long Term Stability (instability and output errors due to Joule-Thomson effects(cooling effects))
Hastelloy for corrosive gases, Stainless Steel 316L (Double-Melt available)
The circuits are isolated from external interferences with EMI/EMC filters
Electro-polished Stainless Steel 316L gas-wetted materials and Cleaning and Package in classroom zone ±0.5% Repeatability, ±0.25% Accuracy
Products are designed with specific functional industry standards(ISA, SEMI, SEMASPEC, ASTM, ASME, FM Approval)
-Compactness
- Reliability
- Easy installation and maintenance
- Standardization
- High performance of key technology
IGS(Integrated Gas delivery System) block module for Process Tools in Semiconductor or Display Industry