Semiconductor,
Display Equipment

CO2 (Carbon Dioxide Purifier)

The Carbon Dioxide(CO₂)Gas Purification System providing sub-ppb or ppt performance is designed to remove impurities in a process gas through use of high qualified catalyst & adsorption. These materials provide wholly purification in using dual columns(vessels) without downtime. Two columns alternate between purification and regeneration modes. Outlet impurity levels are reduced to below sub-ppb or ppt concentration. The purifier uses dual columns processes designed to provide ultra-high purified gases for semiconductor, flat panel display, LED and solar cell applications, as well as it can be manufactured from high flow rates of 5 to 500 Nm³/h.

Leaders and Global has many years of experience in manufacturing purifiers to meet the needs of low cost, high performance and reliability.

특징

  • Safety Alarms and Interlock for High Temperature, Leakage, Over Pressurization
  • Enhanced PLC Controller and electronics box designed for simple operation and reliability
  • All Metal Enclosure
  • High efficiency Preheaters and Heat Exchanger
  • Closed-Loop System for Temperature Control



선택 사양


  • Communication Module(RS422/485, MODBUS, TCP/IP(Ethernet))

  • Auto or Manual Bypass manifold kit

  • MFM(Mass Flow Meter)

  • UPS(Uninterrupted Power Supply)

  • 0.003㎛, Metal Particle Filter

  • Isolation Valves and Pressure Transducers on downstream and upstream





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